Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform

Tailoring the ion energy distribution function (IEDF) is vital for advanced plasma processing applications. Capacitively coupled (CCP) discharges excited using a non-sinusoidal waveform have shown its capability to control IEDF through generation of asymmetry and DC self-bias. In this paper, we performed particle-in-cell simulation study investigate in symmetric capacitive discharge by saw-tooth-like current at very high frequency. At constant driving frequency 27.12 MHz, results predict that scales with amplitude. A transition from single narrow peak bi-modal type observed an increase density Further studies varying fundamental excitation show enhances reduction Increase significant self-bias lower be one principal factors responsible peaks. An investigation potential confirms powered electrode corresponds respect potential, grounded potential. These suggest although beneficial generating large self-bias, low plausible driven CCP systems.